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Plasma-Surface Interaction Data Set 456

Sputtering of Kr+ on W(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
34.760.0
40.893.935e-05
48.110.0003271
56.60.001322
66.590.003966
78.350.01005
92.170.02265
108.40.04625
127.60.08589
150.10.1446
176.60.2208
207.80.3077
244.40.3976
287.60.4856
338.30.5702
398.00.6523
468.30.7336
550.90.8161
648.20.9012
762.60.99
897.21.084
1056.01.182
1242.01.287
1461.01.397
1719.01.514
2022.01.637
2379.01.766
2799.01.902
3293.02.043
3874.02.191
4558.02.343
5363.02.501
6309.02.663
7423.02.83
8733.02.999
10270.03.171
12090.03.345
14220.03.519
16730.03.693
19680.03.865
23160.04.035
27240.04.201
32050.04.361
37710.04.515
44370.04.661
52200.04.798
61410.04.923
72250.05.036
85000.05.134

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 34.76 – 100000