{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1747, "q": 13.69, "mu": 2.516, "epsilonL": 1.571e-06, "Eth": 34.76}, "E_min": 34.76, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.76	0.0	
40.89	3.935e-05	
48.11	0.0003271	
56.6	0.001322	
66.59	0.003966	
78.35	0.01005	
92.17	0.02265	
108.4	0.04625	
127.6	0.08589	
150.1	0.1446	
176.6	0.2208	
207.8	0.3077	
244.4	0.3976	
287.6	0.4856	
338.3	0.5702	
398.0	0.6523	
468.3	0.7336	
550.9	0.8161	
648.2	0.9012	
762.6	0.99	
897.2	1.084	
1056.0	1.182	
1242.0	1.287	
1461.0	1.397	
1719.0	1.514	
2022.0	1.637	
2379.0	1.766	
2799.0	1.902	
3293.0	2.043	
3874.0	2.191	
4558.0	2.343	
5363.0	2.501	
6309.0	2.663	
7423.0	2.83	
8733.0	2.999	
10270.0	3.171	
12090.0	3.345	
14220.0	3.519	
16730.0	3.693	
19680.0	3.865	
23160.0	4.035	
27240.0	4.201	
32050.0	4.361	
37710.0	4.515	
44370.0	4.661	
52200.0	4.798	
61410.0	4.923	
72250.0	5.036	
85000.0	5.134	
-----