pwiDB

Plasma-Surface Interaction Data Set 455

Sputtering of Ar⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	27.05	0.0
	31.99	3.876e-05
	37.83	0.0002945
	44.73	0.001128
	52.9	0.003258
	62.55	0.008004
	73.97	0.01755
	87.47	0.03493
	103.4	0.06332
	122.3	0.1043
	144.6	0.1561
	171.0	0.214
	202.3	0.2732
	239.2	0.3304
	282.8	0.3849
	334.5	0.4373
	395.5	0.4888
	467.7	0.5404
	553.1	0.593
	654.1	0.6474
	773.4	0.7038
	914.6	0.7626
	1082.0	0.8239
	1279.0	0.8878
	1512.0	0.9542
	1789.0	1.023
	2115.0	1.094
	2501.0	1.167
	2958.0	1.242
	3497.0	1.318
	4136.0	1.395
	4891.0	1.473
	5783.0	1.551
	6839.0	1.629
	8087.0	1.706
	9564.0	1.781
	11310.0	1.855
	13370.0	1.926
	15810.0	1.993
	18700.0	2.056
	22110.0	2.115
	26150.0	2.168
	30930.0	2.215
	36570.0	2.254
	43250.0	2.286
	51140.0	2.309
	60470.0	2.322
	71510.0	2.326
	84560.0	2.319

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2113
q = 5.948
mu = 2.386
epsilonL = 4.054e-06
Eth = 27.05

Fit range

E = 27.05 – 100000