{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2113, "q": 5.948, "mu": 2.386, "epsilonL": 4.054e-06, "Eth": 27.05}, "E_min": 27.05, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
27.05	0.0	
31.99	3.876e-05	
37.83	0.0002945	
44.73	0.001128	
52.9	0.003258	
62.55	0.008004	
73.97	0.01755	
87.47	0.03493	
103.4	0.06332	
122.3	0.1043	
144.6	0.1561	
171.0	0.214	
202.3	0.2732	
239.2	0.3304	
282.8	0.3849	
334.5	0.4373	
395.5	0.4888	
467.7	0.5404	
553.1	0.593	
654.1	0.6474	
773.4	0.7038	
914.6	0.7626	
1082.0	0.8239	
1279.0	0.8878	
1512.0	0.9542	
1789.0	1.023	
2115.0	1.094	
2501.0	1.167	
2958.0	1.242	
3497.0	1.318	
4136.0	1.395	
4891.0	1.473	
5783.0	1.551	
6839.0	1.629	
8087.0	1.706	
9564.0	1.781	
11310.0	1.855	
13370.0	1.926	
15810.0	1.993	
18700.0	2.056	
22110.0	2.115	
26150.0	2.168	
30930.0	2.215	
36570.0	2.254	
43250.0	2.286	
51140.0	2.309	
60470.0	2.322	
71510.0	2.326	
84560.0	2.319	
-----