pwiDB

Plasma-Surface Interaction Data Set 454

Sputtering of Ne⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	38.64	0.0
	45.36	0.0002361
	53.25	0.001252
	62.51	0.003755
	73.39	0.008828
	86.16	0.0179
	101.1	0.03245
	118.7	0.05347
	139.4	0.08073
	163.6	0.1127
	192.1	0.147
	225.5	0.1815
	264.8	0.215
	310.8	0.2471
	364.9	0.2778
	428.4	0.3075
	502.9	0.3367
	590.4	0.3658
	693.1	0.3949
	813.6	0.4245
	955.2	0.4544
	1121.0	0.4849
	1316.0	0.5158
	1545.0	0.5472
	1814.0	0.579
	2130.0	0.611
	2500.0	0.6432
	2935.0	0.6753
	3446.0	0.7072
	4045.0	0.7387
	4749.0	0.7695
	5575.0	0.7996
	6545.0	0.8285
	7684.0	0.8561
	9020.0	0.8821
	10590.0	0.9062
	12430.0	0.9282
	14590.0	0.9476
	17130.0	0.9644
	20110.0	0.978
	23610.0	0.9884
	27720.0	0.9951
	32540.0	0.998
	38200.0	0.9968
	44850.0	0.9913
	52650.0	0.9815
	61810.0	0.9673
	72560.0	0.9488
	85180.0	0.9261

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0828
q = 2.552
mu = 1.953
epsilonL = 8.396e-06
Eth = 38.64

Fit range

E = 38.64 – 100000