{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0828, "q": 2.552, "mu": 1.953, "epsilonL": 8.396e-06, "Eth": 38.64}, "E_min": 38.64, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
38.64	0.0	
45.36	0.0002361	
53.25	0.001252	
62.51	0.003755	
73.39	0.008828	
86.16	0.0179	
101.1	0.03245	
118.7	0.05347	
139.4	0.08073	
163.6	0.1127	
192.1	0.147	
225.5	0.1815	
264.8	0.215	
310.8	0.2471	
364.9	0.2778	
428.4	0.3075	
502.9	0.3367	
590.4	0.3658	
693.1	0.3949	
813.6	0.4245	
955.2	0.4544	
1121.0	0.4849	
1316.0	0.5158	
1545.0	0.5472	
1814.0	0.579	
2130.0	0.611	
2500.0	0.6432	
2935.0	0.6753	
3446.0	0.7072	
4045.0	0.7387	
4749.0	0.7695	
5575.0	0.7996	
6545.0	0.8285	
7684.0	0.8561	
9020.0	0.8821	
10590.0	0.9062	
12430.0	0.9282	
14590.0	0.9476	
17130.0	0.9644	
20110.0	0.978	
23610.0	0.9884	
27720.0	0.9951	
32540.0	0.998	
38200.0	0.9968	
44850.0	0.9913	
52650.0	0.9815	
61810.0	0.9673	
72560.0	0.9488	
85180.0	0.9261	
-----