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Plasma-Surface Interaction Data Set 453

Sputtering of O⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	44.21	0.0
	51.76	0.0003757
	60.6	0.00169
	70.95	0.004548
	83.06	0.009812
	97.24	0.01851
	113.8	0.03159
	133.3	0.04958
	156.0	0.0722
	182.7	0.09837
	213.9	0.1265
	250.4	0.1552
	293.1	0.1833
	343.2	0.2104
	401.8	0.2364
	470.4	0.2614
	550.7	0.2858
	644.7	0.3096
	754.7	0.3332
	883.6	0.3567
	1034.0	0.3802
	1211.0	0.4037
	1418.0	0.4273
	1660.0	0.451
	1943.0	0.4746
	2275.0	0.4981
	2664.0	0.5214
	3118.0	0.5443
	3651.0	0.5668
	4274.0	0.5887
	5004.0	0.6097
	5858.0	0.6298
	6858.0	0.6488
	8029.0	0.6665
	9400.0	0.6826
	11000.0	0.697
	12880.0	0.7094
	15080.0	0.7197
	17660.0	0.7277
	20670.0	0.7332
	24200.0	0.7359
	28340.0	0.7357
	33170.0	0.7326
	38840.0	0.7264
	45470.0	0.717
	53230.0	0.7046
	62320.0	0.6891
	72960.0	0.6707
	85420.0	0.6496

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0777
q = 1.882
mu = 1.754
epsilonL = 1.087e-05
Eth = 44.21

Fit range

E = 44.21 – 100000