{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of O+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0777, "q": 1.882, "mu": 1.754, "epsilonL": 1.087e-05, "Eth": 44.21}, "E_min": 44.21, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
44.21	0.0	
51.76	0.0003757	
60.6	0.00169	
70.95	0.004548	
83.06	0.009812	
97.24	0.01851	
113.8	0.03159	
133.3	0.04958	
156.0	0.0722	
182.7	0.09837	
213.9	0.1265	
250.4	0.1552	
293.1	0.1833	
343.2	0.2104	
401.8	0.2364	
470.4	0.2614	
550.7	0.2858	
644.7	0.3096	
754.7	0.3332	
883.6	0.3567	
1034.0	0.3802	
1211.0	0.4037	
1418.0	0.4273	
1660.0	0.451	
1943.0	0.4746	
2275.0	0.4981	
2664.0	0.5214	
3118.0	0.5443	
3651.0	0.5668	
4274.0	0.5887	
5004.0	0.6097	
5858.0	0.6298	
6858.0	0.6488	
8029.0	0.6665	
9400.0	0.6826	
11000.0	0.697	
12880.0	0.7094	
15080.0	0.7197	
17660.0	0.7277	
20670.0	0.7332	
24200.0	0.7359	
28340.0	0.7357	
33170.0	0.7326	
38840.0	0.7264	
45470.0	0.717	
53230.0	0.7046	
62320.0	0.6891	
72960.0	0.6707	
85420.0	0.6496	
-----