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Plasma-Surface Interaction Data Set 452

Sputtering of N⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	45.34	1.206e-34
	53.05	0.0001787
	62.08	0.0009923
	72.64	0.003054
	84.99	0.007289
	99.45	0.01488
	116.4	0.02696
	136.2	0.04403
	159.3	0.06547
	186.5	0.0896
	218.2	0.1144
	255.3	0.1385
	298.7	0.1611
	349.6	0.1821
	409.0	0.2018
	478.6	0.2206
	560.0	0.2389
	655.3	0.2568
	766.8	0.2746
	897.3	0.2924
	1050.0	0.3102
	1229.0	0.3281
	1438.0	0.346
	1682.0	0.3639
	1968.0	0.3817
	2303.0	0.3994
	2695.0	0.4168
	3154.0	0.4339
	3690.0	0.4505
	4318.0	0.4665
	5053.0	0.4818
	5912.0	0.4962
	6918.0	0.5097
	8095.0	0.5219
	9472.0	0.5329
	11080.0	0.5423
	12970.0	0.5502
	15180.0	0.5563
	17760.0	0.5604
	20780.0	0.5625
	24320.0	0.5624
	28450.0	0.5601
	33290.0	0.5553
	38960.0	0.5483
	45580.0	0.5388
	53340.0	0.5271
	62420.0	0.5131
	73030.0	0.4971
	85460.0	0.4792

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0921
q = 1.439
mu = 2.022
epsilonL = 1.265e-05
Eth = 45.34

Fit range

E = 45.34 – 100000