{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of N+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0921, "q": 1.439, "mu": 2.022, "epsilonL": 1.265e-05, "Eth": 45.34}, "E_min": 45.34, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
45.34	1.206e-34	
53.05	0.0001787	
62.08	0.0009923	
72.64	0.003054	
84.99	0.007289	
99.45	0.01488	
116.4	0.02696	
136.2	0.04403	
159.3	0.06547	
186.5	0.0896	
218.2	0.1144	
255.3	0.1385	
298.7	0.1611	
349.6	0.1821	
409.0	0.2018	
478.6	0.2206	
560.0	0.2389	
655.3	0.2568	
766.8	0.2746	
897.3	0.2924	
1050.0	0.3102	
1229.0	0.3281	
1438.0	0.346	
1682.0	0.3639	
1968.0	0.3817	
2303.0	0.3994	
2695.0	0.4168	
3154.0	0.4339	
3690.0	0.4505	
4318.0	0.4665	
5053.0	0.4818	
5912.0	0.4962	
6918.0	0.5097	
8095.0	0.5219	
9472.0	0.5329	
11080.0	0.5423	
12970.0	0.5502	
15180.0	0.5563	
17760.0	0.5604	
20780.0	0.5625	
24320.0	0.5624	
28450.0	0.5601	
33290.0	0.5553	
38960.0	0.5483	
45580.0	0.5388	
53340.0	0.5271	
62420.0	0.5131	
73030.0	0.4971	
85460.0	0.4792	
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