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Plasma-Surface Interaction Data Set 451

Sputtering of 4He+ on W(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
120.60.0
138.30.0001055
158.60.00044
181.90.001108
208.70.002241
239.40.003964
274.50.006343
314.90.009341
361.20.0128
414.30.01647
475.20.02009
545.10.02348
625.20.02654
717.10.02922
822.50.03155
943.40.03358
1082.00.03535
1241.00.03692
1424.00.0383
1633.00.03953
1873.00.04062
2148.00.04159
2464.00.04244
2827.00.04317
3242.00.04378
3719.00.04427
4265.00.04464
4892.00.04488
5612.00.04498
6437.00.04495
7383.00.04477
8468.00.04445
9713.00.04398
11140.00.04337
12780.00.04262
14660.00.04172
16810.00.0407
19280.00.03955
22120.00.03829
25370.00.03694
29100.00.03549
33380.00.03398
38290.00.03241
43910.00.0308
50370.00.02918
57770.00.02754
66270.00.02591
76010.00.02429
87180.00.02271

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 120.6 – 100000