{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1692, "q": 0.1151, "mu": 1.712, "epsilonL": 4.909e-05, "Eth": 120.6}, "E_min": 120.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
120.6	0.0	
138.3	0.0001055	
158.6	0.00044	
181.9	0.001108	
208.7	0.002241	
239.4	0.003964	
274.5	0.006343	
314.9	0.009341	
361.2	0.0128	
414.3	0.01647	
475.2	0.02009	
545.1	0.02348	
625.2	0.02654	
717.1	0.02922	
822.5	0.03155	
943.4	0.03358	
1082.0	0.03535	
1241.0	0.03692	
1424.0	0.0383	
1633.0	0.03953	
1873.0	0.04062	
2148.0	0.04159	
2464.0	0.04244	
2827.0	0.04317	
3242.0	0.04378	
3719.0	0.04427	
4265.0	0.04464	
4892.0	0.04488	
5612.0	0.04498	
6437.0	0.04495	
7383.0	0.04477	
8468.0	0.04445	
9713.0	0.04398	
11140.0	0.04337	
12780.0	0.04262	
14660.0	0.04172	
16810.0	0.0407	
19280.0	0.03955	
22120.0	0.03829	
25370.0	0.03694	
29100.0	0.03549	
33380.0	0.03398	
38290.0	0.03241	
43910.0	0.0308	
50370.0	0.02918	
57770.0	0.02754	
66270.0	0.02591	
76010.0	0.02429	
87180.0	0.02271	
-----