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Plasma-Surface Interaction Data Set 450

Sputtering of 3He+ on W(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
164.31.446e-22
187.30.0001763
213.50.0005075
243.30.001015
277.40.001737
316.10.002715
360.30.003981
410.70.005551
468.10.007416
533.50.009535
608.10.01184
693.10.01426
790.00.01668
900.40.01904
1026.00.02126
1170.00.02331
1333.00.02516
1520.00.02681
1732.00.02826
1974.00.02953
2250.00.03062
2565.00.03155
2923.00.03233
3332.00.03297
3797.00.03348
4328.00.03387
4933.00.03414
5623.00.03429
6408.00.03432
7304.00.03424
8325.00.03405
9489.00.03375
10820.00.03334
12330.00.03282
14050.00.03221
16010.00.03149
18250.00.03069
20800.00.0298
23710.00.02884
27030.00.02781
30800.00.02673
35110.00.02561
40020.00.02445
45610.00.02326
51990.00.02207
59250.00.02087
67540.00.01968
76980.00.0185
87740.00.01734

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 164.3 – 100000