{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2424, "q": 0.0884, "mu": 1.244, "epsilonL": 4.934e-05, "Eth": 164.3}, "E_min": 164.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
164.3	1.446e-22	
187.3	0.0001763	
213.5	0.0005075	
243.3	0.001015	
277.4	0.001737	
316.1	0.002715	
360.3	0.003981	
410.7	0.005551	
468.1	0.007416	
533.5	0.009535	
608.1	0.01184	
693.1	0.01426	
790.0	0.01668	
900.4	0.01904	
1026.0	0.02126	
1170.0	0.02331	
1333.0	0.02516	
1520.0	0.02681	
1732.0	0.02826	
1974.0	0.02953	
2250.0	0.03062	
2565.0	0.03155	
2923.0	0.03233	
3332.0	0.03297	
3797.0	0.03348	
4328.0	0.03387	
4933.0	0.03414	
5623.0	0.03429	
6408.0	0.03432	
7304.0	0.03424	
8325.0	0.03405	
9489.0	0.03375	
10820.0	0.03334	
12330.0	0.03282	
14050.0	0.03221	
16010.0	0.03149	
18250.0	0.03069	
20800.0	0.0298	
23710.0	0.02884	
27030.0	0.02781	
30800.0	0.02673	
35110.0	0.02561	
40020.0	0.02445	
45610.0	0.02326	
51990.0	0.02207	
59250.0	0.02087	
67540.0	0.01968	
76980.0	0.0185	
87740.0	0.01734	
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