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Plasma-Surface Interaction Data Set 447

Sputtering of H+ on W(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
457.40.0
510.61.702e-05
569.94.616e-05
636.28.815e-05
710.10.0001453
792.60.0002203
884.70.0003155
987.50.0004327
1102.00.0005727
1230.00.0007345
1373.00.0009155
1533.00.001111
1711.00.001315
1910.00.001519
2132.00.001718
2380.00.001903
2656.00.00207
2965.00.002216
3310.00.002338
3694.00.002436
4124.00.002511
4603.00.002565
5138.00.002598
5735.00.002613
6402.00.002613
7145.00.002598
7976.00.002571
8903.00.002534
9938.00.002486
11090.00.002431
12380.00.00237
13820.00.002302
15430.00.00223
17220.00.002153
19220.00.002074
21450.00.001993
23950.00.001909
26730.00.001825
29840.00.001741
33310.00.001657
37180.00.001574
41500.00.001492
46320.00.001411
51700.00.001332
57710.00.001256
64420.00.001181
71900.00.00111
80260.00.001041
89590.00.0009746

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 457.4 – 100000