Return to search

Plasma-Surface Interaction Data Set 446

Sputtering of Ta+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ta+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
41.492.376e-34
48.648.015e-05
57.020.0004352
66.840.00134
78.350.00327
91.850.007012
107.70.01381
126.20.02552
148.00.04468
173.40.07441
203.30.1179
238.30.1774
279.40.2535
327.50.3443
383.90.4465
450.10.556
527.60.67
618.50.7866
725.00.9056
849.91.027
996.31.153
1168.01.284
1369.01.421
1605.01.566
1881.01.719
2205.01.882
2585.02.054
3031.02.237
3553.02.431
4165.02.637
4882.02.854
5723.03.084
6709.03.325
7864.03.577
9219.03.841
10810.04.117
12670.04.402
14850.04.698
17410.05.002
20410.05.315
23920.05.634
28040.05.959
32870.06.288
38540.06.619
45170.06.951
52960.07.282
62080.07.609
72770.07.932
85310.08.246

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 41.49 – 100000