pwiDB

Plasma-Surface Interaction Data Set 443

Sputtering of Ar⁺ on Ta(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Ta(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.62	0.0
	33.8	6.389e-05
	39.93	0.0004765
	47.16	0.001799
	55.7	0.005116
	65.8	0.01233
	77.72	0.02634
	91.8	0.05061
	108.4	0.08774
	128.1	0.1373
	151.3	0.1954
	178.7	0.2564
	211.1	0.3162
	249.3	0.3733
	294.5	0.4278
	347.8	0.4809
	410.8	0.5337
	485.3	0.5873
	573.2	0.6424
	677.0	0.6995
	799.7	0.7591
	944.5	0.8212
	1116.0	0.886
	1318.0	0.9535
	1557.0	1.024
	1839.0	1.096
	2172.0	1.171
	2565.0	1.248
	3030.0	1.326
	3579.0	1.406
	4227.0	1.487
	4993.0	1.569
	5898.0	1.651
	6966.0	1.732
	8228.0	1.812
	9719.0	1.891
	11480.0	1.967
	13560.0	2.041
	16020.0	2.111
	18920.0	2.176
	22340.0	2.237
	26390.0	2.291
	31170.0	2.339
	36820.0	2.379
	43490.0	2.411
	51370.0	2.434
	60680.0	2.448
	71680.0	2.45
	84660.0	2.442

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1468
q = 6.266
mu = 2.367
epsilonL = 4.112e-06
Eth = 28.62

Fit range

E = 28.62 – 100000