{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Ta(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1468, "q": 6.266, "mu": 2.367, "epsilonL": 4.112e-06, "Eth": 28.62}, "E_min": 28.62, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.62	0.0	
33.8	6.389e-05	
39.93	0.0004765	
47.16	0.001799	
55.7	0.005116	
65.8	0.01233	
77.72	0.02634	
91.8	0.05061	
108.4	0.08774	
128.1	0.1373	
151.3	0.1954	
178.7	0.2564	
211.1	0.3162	
249.3	0.3733	
294.5	0.4278	
347.8	0.4809	
410.8	0.5337	
485.3	0.5873	
573.2	0.6424	
677.0	0.6995	
799.7	0.7591	
944.5	0.8212	
1116.0	0.886	
1318.0	0.9535	
1557.0	1.024	
1839.0	1.096	
2172.0	1.171	
2565.0	1.248	
3030.0	1.326	
3579.0	1.406	
4227.0	1.487	
4993.0	1.569	
5898.0	1.651	
6966.0	1.732	
8228.0	1.812	
9719.0	1.891	
11480.0	1.967	
13560.0	2.041	
16020.0	2.111	
18920.0	2.176	
22340.0	2.237	
26390.0	2.291	
31170.0	2.339	
36820.0	2.379	
43490.0	2.411	
51370.0	2.434	
60680.0	2.448	
71680.0	2.45	
84660.0	2.442	
-----