pwiDB

Plasma-Surface Interaction Data Set 442

Sputtering of Ne⁺ on Ta(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ta(pc) at 300 K

angle = 0.0 deg	E /eV	P
	36.36	0.0
	42.73	0.000273
	50.23	0.001522
	59.04	0.004702
	69.4	0.01125
	81.57	0.02296
	95.88	0.04144
	112.7	0.06724
	132.5	0.09917
	155.7	0.1347
	183.0	0.1711
	215.1	0.2066
	252.9	0.2404
	297.2	0.2726
	349.4	0.3036
	410.6	0.334
	482.7	0.3642
	567.3	0.3946
	666.9	0.4255
	783.8	0.4569
	921.3	0.489
	1083.0	0.5218
	1273.0	0.5552
	1496.0	0.5892
	1759.0	0.6237
	2067.0	0.6586
	2430.0	0.6936
	2856.0	0.7286
	3357.0	0.7634
	3946.0	0.7977
	4638.0	0.8314
	5452.0	0.8642
	6408.0	0.8958
	7532.0	0.926
	8853.0	0.9544
	10410.0	0.9807
	12230.0	1.005
	14380.0	1.026
	16900.0	1.044
	19860.0	1.059
	23350.0	1.07
	27440.0	1.077
	32260.0	1.08
	37920.0	1.079
	44570.0	1.073
	52390.0	1.062
	61580.0	1.046
	72380.0	1.025
	85080.0	1.0

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0675
q = 2.763
mu = 2.017
epsilonL = 8.528e-06
Eth = 36.36

Fit range

E = 36.36 – 100000