{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Ta(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0675, "q": 2.763, "mu": 2.017, "epsilonL": 8.528e-06, "Eth": 36.36}, "E_min": 36.36, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
36.36	0.0	
42.73	0.000273	
50.23	0.001522	
59.04	0.004702	
69.4	0.01125	
81.57	0.02296	
95.88	0.04144	
112.7	0.06724	
132.5	0.09917	
155.7	0.1347	
183.0	0.1711	
215.1	0.2066	
252.9	0.2404	
297.2	0.2726	
349.4	0.3036	
410.6	0.334	
482.7	0.3642	
567.3	0.3946	
666.9	0.4255	
783.8	0.4569	
921.3	0.489	
1083.0	0.5218	
1273.0	0.5552	
1496.0	0.5892	
1759.0	0.6237	
2067.0	0.6586	
2430.0	0.6936	
2856.0	0.7286	
3357.0	0.7634	
3946.0	0.7977	
4638.0	0.8314	
5452.0	0.8642	
6408.0	0.8958	
7532.0	0.926	
8853.0	0.9544	
10410.0	0.9807	
12230.0	1.005	
14380.0	1.026	
16900.0	1.044	
19860.0	1.059	
23350.0	1.07	
27440.0	1.077	
32260.0	1.08	
37920.0	1.079	
44570.0	1.073	
52390.0	1.062	
61580.0	1.046	
72380.0	1.025	
85080.0	1.0	
-----