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Plasma-Surface Interaction Data Set 441

Sputtering of 4He+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
116.31.761e-23
133.50.0002682
153.20.0008161
175.90.001676
201.90.002899
231.70.004514
266.00.006515
305.30.008848
350.50.01142
402.30.01411
461.80.0168
530.10.01939
608.40.02182
698.40.02405
801.70.02608
920.20.0279
1056.00.02953
1212.00.03099
1392.00.03229
1597.00.03346
1834.00.03449
2105.00.0354
2416.00.0362
2773.00.03689
3183.00.03746
3654.00.03792
4194.00.03827
4814.00.03849
5526.00.0386
6343.00.03858
7281.00.03844
8357.00.03816
9593.00.03776
11010.00.03723
12640.00.03658
14510.00.0358
16650.00.03491
19110.00.03392
21940.00.03282
25180.00.03165
28910.00.03039
33180.00.02908
38090.00.02773
43720.00.02634
50180.00.02493
57600.00.02351
66120.00.02211
75900.00.02072
87120.00.01935

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 116.3 – 100000