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Plasma-Surface Interaction Data Set 440

Sputtering of 3He+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
132.00.0
151.11.242e-05
173.06.92e-05
198.00.0002117
226.70.0005045
259.60.001042
297.20.001946
340.20.003351
389.50.005356
446.00.007963
510.60.01103
584.60.01432
669.30.01752
766.30.02044
877.30.02296
1004.00.02509
1150.00.02685
1317.00.02832
1507.00.02954
1726.00.03058
1976.00.03147
2262.00.03222
2590.00.03286
2965.00.0334
3395.00.03384
3887.00.03418
4450.00.03442
5095.00.03455
5833.00.03459
6678.00.03452
7646.00.03434
8754.00.03405
10020.00.03365
11470.00.03314
13140.00.03253
15040.00.03181
17220.00.031
19720.00.0301
22570.00.02912
25840.00.02807
29590.00.02696
33870.00.0258
38780.00.0246
44400.00.02338
50840.00.02214
58200.00.0209
66630.00.01966
76290.00.01844
87340.00.01725

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 132 – 100000