{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ta(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5951, "q": 0.0885, "mu": 2.079, "epsilonL": 5.021e-05, "Eth": 132}, "E_min": 132, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
132.0	0.0	
151.1	1.242e-05	
173.0	6.92e-05	
198.0	0.0002117	
226.7	0.0005045	
259.6	0.001042	
297.2	0.001946	
340.2	0.003351	
389.5	0.005356	
446.0	0.007963	
510.6	0.01103	
584.6	0.01432	
669.3	0.01752	
766.3	0.02044	
877.3	0.02296	
1004.0	0.02509	
1150.0	0.02685	
1317.0	0.02832	
1507.0	0.02954	
1726.0	0.03058	
1976.0	0.03147	
2262.0	0.03222	
2590.0	0.03286	
2965.0	0.0334	
3395.0	0.03384	
3887.0	0.03418	
4450.0	0.03442	
5095.0	0.03455	
5833.0	0.03459	
6678.0	0.03452	
7646.0	0.03434	
8754.0	0.03405	
10020.0	0.03365	
11470.0	0.03314	
13140.0	0.03253	
15040.0	0.03181	
17220.0	0.031	
19720.0	0.0301	
22570.0	0.02912	
25840.0	0.02807	
29590.0	0.02696	
33870.0	0.0258	
38780.0	0.0246	
44400.0	0.02338	
50840.0	0.02214	
58200.0	0.0209	
66630.0	0.01966	
76290.0	0.01844	
87340.0	0.01725	
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