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Plasma-Surface Interaction Data Set 438

Sputtering of D+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
225.67.246e-16
255.50.0001141
289.30.000227
327.60.0003609
371.00.0005225
420.10.0007169
475.80.0009485
538.80.001221
610.10.001537
690.90.001896
782.50.002297
886.10.002736
1003.00.003206
1136.00.003697
1287.00.004198
1457.00.004697
1650.00.005181
1869.00.005638
2116.00.006058
2397.00.006434
2714.00.006759
3073.00.007031
3480.00.007247
3941.00.007409
4463.00.007518
5054.00.007577
5724.00.007588
6482.00.007555
7340.00.007482
8312.00.007372
9413.00.007231
10660.00.007061
12070.00.006866
13670.00.00665
15480.00.006416
17530.00.006168
19850.00.00591
22480.00.005643
25460.00.005371
28830.00.005097
32650.00.004824
36970.00.004552
41870.00.004284
47420.00.004022
53690.00.003766
60810.00.003519
68860.00.003281
77980.00.003053
88310.00.002835

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 225.6 – 100000