{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ta(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6251, "q": 0.0218, "mu": 0.7705, "epsilonL": 0.0001026, "Eth": 225.6}, "E_min": 225.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
225.6	7.246e-16	
255.5	0.0001141	
289.3	0.000227	
327.6	0.0003609	
371.0	0.0005225	
420.1	0.0007169	
475.8	0.0009485	
538.8	0.001221	
610.1	0.001537	
690.9	0.001896	
782.5	0.002297	
886.1	0.002736	
1003.0	0.003206	
1136.0	0.003697	
1287.0	0.004198	
1457.0	0.004697	
1650.0	0.005181	
1869.0	0.005638	
2116.0	0.006058	
2397.0	0.006434	
2714.0	0.006759	
3073.0	0.007031	
3480.0	0.007247	
3941.0	0.007409	
4463.0	0.007518	
5054.0	0.007577	
5724.0	0.007588	
6482.0	0.007555	
7340.0	0.007482	
8312.0	0.007372	
9413.0	0.007231	
10660.0	0.007061	
12070.0	0.006866	
13670.0	0.00665	
15480.0	0.006416	
17530.0	0.006168	
19850.0	0.00591	
22480.0	0.005643	
25460.0	0.005371	
28830.0	0.005097	
32650.0	0.004824	
36970.0	0.004552	
41870.0	0.004284	
47420.0	0.004022	
53690.0	0.003766	
60810.0	0.003519	
68860.0	0.003281	
77980.0	0.003053	
88310.0	0.002835	
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