pwiDB

Plasma-Surface Interaction Data Set 436

Sputtering of Xe⁺ on Hf(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Hf(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.77	0.0
	38.59	0.0001097
	45.46	0.0006373
	53.55	0.002053
	63.08	0.005184
	74.3	0.01141
	87.52	0.02288
	103.1	0.04259
	121.4	0.07418
	143.0	0.1211
	168.5	0.1853
	198.5	0.2659
	233.8	0.3594
	275.4	0.4612
	324.3	0.5672
	382.1	0.675
	450.0	0.784
	530.1	0.8947
	624.4	1.008
	735.5	1.126
	866.3	1.25
	1020.0	1.38
	1202.0	1.518
	1416.0	1.664
	1668.0	1.82
	1965.0	1.985
	2314.0	2.161
	2726.0	2.347
	3211.0	2.543
	3782.0	2.751
	4455.0	2.969
	5247.0	3.198
	6181.0	3.436
	7281.0	3.685
	8576.0	3.942
	10100.0	4.208
	11900.0	4.481
	14020.0	4.761
	16510.0	5.046
	19450.0	5.335
	22910.0	5.626
	26980.0	5.918
	31780.0	6.209
	37440.0	6.497
	44100.0	6.78
	51950.0	7.056
	61190.0	7.323
	72070.0	7.578
	84900.0	7.819

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1218
q = 22.78
mu = 2.054
epsilonL = 8.578e-07
Eth = 32.77

Fit range

E = 32.77 – 100000