pwiDB

Plasma-Surface Interaction Data Set 435

Sputtering of Kr⁺ on Hf(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Hf(pc) at 300 K

angle = 0.0 deg	E /eV	P
	27.18	5.765e-33
	32.13	0.0002018
	38.0	0.001054
	44.93	0.003175
	53.12	0.00761
	62.81	0.01599
	74.27	0.03067
	87.82	0.05458
	103.8	0.09077
	122.8	0.1414
	145.2	0.2066
	171.7	0.2843
	203.0	0.3708
	240.0	0.4625
	283.8	0.5565
	335.6	0.6519
	396.8	0.7484
	469.2	0.8469
	554.7	0.9482
	655.9	1.053
	775.6	1.163
	917.1	1.279
	1084.0	1.401
	1282.0	1.53
	1516.0	1.666
	1793.0	1.809
	2120.0	1.96
	2506.0	2.119
	2963.0	2.285
	3504.0	2.458
	4143.0	2.638
	4899.0	2.824
	5793.0	3.016
	6849.0	3.213
	8099.0	3.415
	9576.0	3.619
	11320.0	3.826
	13390.0	4.035
	15830.0	4.243
	18720.0	4.449
	22130.0	4.653
	26170.0	4.851
	30950.0	5.044
	36590.0	5.229
	43270.0	5.404
	51160.0	5.567
	60490.0	5.716
	71520.0	5.849
	84570.0	5.965

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0969
q = 15.88
mu = 1.909
epsilonL = 1.608e-06
Eth = 27.18

Fit range

E = 27.18 – 100000