pwiDB

Plasma-Surface Interaction Data Set 433

Sputtering of Ne⁺ on Hf(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Hf(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.8	5.427e-29
	34.01	0.0004607
	40.17	0.00197
	47.44	0.005171
	56.02	0.01101
	66.17	0.02067
	78.14	0.03534
	92.29	0.05586
	109.0	0.08233
	128.7	0.1139
	152.0	0.1491
	179.6	0.1861
	212.1	0.2237
	250.4	0.261
	295.8	0.2978
	349.3	0.334
	412.6	0.3699
	487.2	0.4058
	575.4	0.4419
	679.6	0.4784
	802.6	0.5155
	947.9	0.5533
	1120.0	0.5917
	1322.0	0.6308
	1562.0	0.6704
	1844.0	0.7105
	2178.0	0.7508
	2572.0	0.7912
	3038.0	0.8314
	3588.0	0.8713
	4237.0	0.9104
	5004.0	0.9487
	5910.0	0.9856
	6980.0	1.021
	8244.0	1.054
	9736.0	1.085
	11500.0	1.114
	13580.0	1.139
	16040.0	1.161
	18940.0	1.179
	22370.0	1.192
	26420.0	1.201
	31200.0	1.205
	36850.0	1.204
	43520.0	1.197
	51400.0	1.185
	60710.0	1.167
	71690.0	1.143
	84670.0	1.114

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0698
q = 3.083
mu = 1.667
epsilonL = 8.666e-06
Eth = 28.8

Fit range

E = 28.8 – 100000