{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Hf", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Hf(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0698, "q": 3.083, "mu": 1.667, "epsilonL": 8.666e-06, "Eth": 28.8}, "E_min": 28.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.8	5.427e-29	
34.01	0.0004607	
40.17	0.00197	
47.44	0.005171	
56.02	0.01101	
66.17	0.02067	
78.14	0.03534	
92.29	0.05586	
109.0	0.08233	
128.7	0.1139	
152.0	0.1491	
179.6	0.1861	
212.1	0.2237	
250.4	0.261	
295.8	0.2978	
349.3	0.334	
412.6	0.3699	
487.2	0.4058	
575.4	0.4419	
679.6	0.4784	
802.6	0.5155	
947.9	0.5533	
1120.0	0.5917	
1322.0	0.6308	
1562.0	0.6704	
1844.0	0.7105	
2178.0	0.7508	
2572.0	0.7912	
3038.0	0.8314	
3588.0	0.8713	
4237.0	0.9104	
5004.0	0.9487	
5910.0	0.9856	
6980.0	1.021	
8244.0	1.054	
9736.0	1.085	
11500.0	1.114	
13580.0	1.139	
16040.0	1.161	
18940.0	1.179	
22370.0	1.192	
26420.0	1.201	
31200.0	1.205	
36850.0	1.204	
43520.0	1.197	
51400.0	1.185	
60710.0	1.167	
71690.0	1.143	
84670.0	1.114	
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