Return to search

Plasma-Surface Interaction Data Set 432

Sputtering of 4He+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
84.560.0
97.78.759e-05
112.90.0003764
130.40.0009721
150.70.002013
174.10.003642
201.10.005953
232.40.008934
268.50.01244
310.20.01622
358.30.01999
414.00.02354
478.30.02676
552.60.0296
638.50.0321
737.60.0343
852.20.03625
984.60.03798
1138.00.03955
1314.00.04097
1518.00.04225
1754.00.04341
2027.00.04445
2342.00.04537
2705.00.04617
3126.00.04684
3611.00.04737
4172.00.04776
4820.00.048
5569.00.04809
6434.00.04801
7434.00.04776
8589.00.04735
9923.00.04676
11460.00.046
13250.00.04507
15300.00.04398
17680.00.04274
20430.00.04137
23600.00.03987
27270.00.03827
31500.00.03658
36390.00.03483
42050.00.03302
48580.00.03119
56130.00.02935
64840.00.02751
74920.00.02571
86550.00.02393

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 84.56 – 100000