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Plasma-Surface Interaction Data Set 431

Sputtering of 3He+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
115.52.822e-22
132.60.0001743
152.30.0004911
174.80.0009755
200.70.001671
230.40.002627
264.50.003889
303.60.005493
348.60.007451
400.20.009747
459.40.01233
527.40.01512
605.40.01801
695.00.02091
797.90.02372
916.00.02637
1052.00.02881
1207.00.03102
1386.00.033
1591.00.03475
1826.00.03628
2097.00.03761
2407.00.03875
2763.00.0397
3172.00.04049
3642.00.04112
4181.00.04159
4800.00.0419
5510.00.04207
6326.00.04208
7262.00.04194
8337.00.04164
9571.00.04121
10990.00.04062
12610.00.0399
14480.00.03904
16620.00.03805
19080.00.03695
21910.00.03574
25150.00.03444
28870.00.03305
33150.00.03161
38050.00.03012
43690.00.02859
50150.00.02704
57570.00.02549
66090.00.02395
75880.00.02243
87110.00.02095

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 115.5 – 100000