{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Hf", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Hf(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2596, "q": 0.1083, "mu": 1.196, "epsilonL": 5.111e-05, "Eth": 115.5}, "E_min": 115.5, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
115.5	2.822e-22	
132.6	0.0001743	
152.3	0.0004911	
174.8	0.0009755	
200.7	0.001671	
230.4	0.002627	
264.5	0.003889	
303.6	0.005493	
348.6	0.007451	
400.2	0.009747	
459.4	0.01233	
527.4	0.01512	
605.4	0.01801	
695.0	0.02091	
797.9	0.02372	
916.0	0.02637	
1052.0	0.02881	
1207.0	0.03102	
1386.0	0.033	
1591.0	0.03475	
1826.0	0.03628	
2097.0	0.03761	
2407.0	0.03875	
2763.0	0.0397	
3172.0	0.04049	
3642.0	0.04112	
4181.0	0.04159	
4800.0	0.0419	
5510.0	0.04207	
6326.0	0.04208	
7262.0	0.04194	
8337.0	0.04164	
9571.0	0.04121	
10990.0	0.04062	
12610.0	0.0399	
14480.0	0.03904	
16620.0	0.03805	
19080.0	0.03695	
21910.0	0.03574	
25150.0	0.03444	
28870.0	0.03305	
33150.0	0.03161	
38050.0	0.03012	
43690.0	0.02859	
50150.0	0.02704	
57570.0	0.02549	
66090.0	0.02395	
75880.0	0.02243	
87110.0	0.02095	
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