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Plasma-Surface Interaction Data Set 430

Sputtering of T+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
112.31.349e-24
129.00.0001339
148.10.0004192
170.20.0008809
195.50.001556
224.50.002474
257.90.003641
296.30.005035
340.30.006597
390.90.008249
449.00.009901
515.80.01148
592.50.01292
680.60.01421
781.80.01533
898.00.01629
1031.00.0171
1185.00.01778
1361.00.01833
1563.00.01878
1796.00.01913
2063.00.01938
2369.00.01956
2722.00.01965
3126.00.01967
3591.00.01961
4125.00.01948
4739.00.01927
5443.00.019
6252.00.01865
7182.00.01825
8250.00.01778
9476.00.01726
10890.00.01669
12500.00.01607
14360.00.01542
16500.00.01474
18950.00.01404
21770.00.01332
25000.00.01259
28720.00.01186
32990.00.01114
37900.00.01043
43530.00.00973
50000.00.009053
57440.00.008399
65980.00.007772
75790.00.007173
87060.00.006605

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 112.3 – 100000