Return to search

Plasma-Surface Interaction Data Set 429

Sputtering of D+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
157.11.593e-32
179.23.124e-05
204.50.0001423
233.30.000377
266.10.0007887
303.60.001426
346.30.002308
395.10.003405
450.80.004633
514.20.00588
586.70.007044
669.30.008064
763.50.008917
871.10.00961
993.70.01017
1134.00.01061
1293.00.01096
1475.00.01123
1683.00.01144
1920.00.0116
2191.00.01171
2499.00.01178
2851.00.0118
3253.00.01178
3711.00.01173
4234.00.01164
4830.00.01151
5510.00.01134
6286.00.01114
7171.00.01091
8181.00.01064
9333.00.01034
10650.00.01002
12150.00.009673
13860.00.009306
15810.00.008922
18040.00.008525
20580.00.008119
23470.00.007707
26780.00.007293
30550.00.00688
34850.00.006471
39760.00.00607
45360.00.005677
51750.00.005297
59040.00.004929
67350.00.004576
76830.00.004239
87660.00.003918

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 157.1 – 100000