{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Hf", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Hf(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.298, "q": 0.0303, "mu": 1.84, "epsilonL": 0.0001044, "Eth": 157.1}, "E_min": 157.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
157.1	1.593e-32	
179.2	3.124e-05	
204.5	0.0001423	
233.3	0.000377	
266.1	0.0007887	
303.6	0.001426	
346.3	0.002308	
395.1	0.003405	
450.8	0.004633	
514.2	0.00588	
586.7	0.007044	
669.3	0.008064	
763.5	0.008917	
871.1	0.00961	
993.7	0.01017	
1134.0	0.01061	
1293.0	0.01096	
1475.0	0.01123	
1683.0	0.01144	
1920.0	0.0116	
2191.0	0.01171	
2499.0	0.01178	
2851.0	0.0118	
3253.0	0.01178	
3711.0	0.01173	
4234.0	0.01164	
4830.0	0.01151	
5510.0	0.01134	
6286.0	0.01114	
7171.0	0.01091	
8181.0	0.01064	
9333.0	0.01034	
10650.0	0.01002	
12150.0	0.009673	
13860.0	0.009306	
15810.0	0.008922	
18040.0	0.008525	
20580.0	0.008119	
23470.0	0.007707	
26780.0	0.007293	
30550.0	0.00688	
34850.0	0.006471	
39760.0	0.00607	
45360.0	0.005677	
51750.0	0.005297	
59040.0	0.004929	
67350.0	0.004576	
76830.0	0.004239	
87660.0	0.003918	
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