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Plasma-Surface Interaction Data Set 428

Sputtering of H+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
321.00.0
360.92.227e-05
405.76.963e-05
456.20.0001453
512.90.0002555
576.70.0004062
648.30.0006021
728.90.0008444
819.60.00113
921.50.001449
1036.00.001789
1165.00.002133
1310.00.002466
1472.00.002774
1655.00.003048
1861.00.003283
2093.00.003477
2353.00.003633
2645.00.003752
2974.00.003839
3344.00.003898
3760.00.003931
4227.00.003942
4752.00.003933
5343.00.003907
6007.00.003865
6754.00.003809
7594.00.003741
8538.00.003662
9599.00.003573
10790.00.003475
12130.00.00337
13640.00.003259
15340.00.003142
17250.00.00302
19390.00.002896
21800.00.002769
24510.00.002641
27560.00.002513
30980.00.002385
34830.00.002258
39160.00.002133
44030.00.002011
49510.00.001891
55660.00.001776
62580.00.001664
70360.00.001556
79110.00.001453
88940.00.001354

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 321 – 100000