pwiDB

Plasma-Surface Interaction Data Set 427

Sputtering of Ar⁺ on Tm(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Tm(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.485	0.0
	11.46	0.0001997
	13.84	0.001274
	16.72	0.004429
	20.2	0.01192
	24.41	0.02751
	29.49	0.05657
	35.62	0.1049
	43.04	0.1758
	51.99	0.2675
	62.81	0.3731
	75.89	0.4851
	91.68	0.5984
	110.8	0.7116
	133.8	0.8256
	161.6	0.9424
	195.3	1.064
	235.9	1.192
	285.0	1.328
	344.3	1.473
	416.0	1.629
	502.5	1.795
	607.1	1.971
	733.5	2.159
	886.1	2.358
	1070.0	2.569
	1293.0	2.789
	1562.0	3.02
	1887.0	3.26
	2280.0	3.508
	2755.0	3.763
	3328.0	4.023
	4021.0	4.287
	4857.0	4.554
	5868.0	4.82
	7089.0	5.084
	8564.0	5.344
	10350.0	5.596
	12500.0	5.838
	15100.0	6.068
	18240.0	6.281
	22040.0	6.475
	26630.0	6.646
	32170.0	6.791
	38860.0	6.907
	46950.0	6.99
	56710.0	7.038
	68520.0	7.046
	82770.0	7.014

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.101
q = 18.02
mu = 2.108
epsilonL = 4.353e-06
Eth = 9.485

Fit range

E = 9.485 – 100000