{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Tm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.101, "q": 18.02, "mu": 2.108, "epsilonL": 4.353e-06, "Eth": 9.485}, "E_min": 9.485, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.485	0.0	
11.46	0.0001997	
13.84	0.001274	
16.72	0.004429	
20.2	0.01192	
24.41	0.02751	
29.49	0.05657	
35.62	0.1049	
43.04	0.1758	
51.99	0.2675	
62.81	0.3731	
75.89	0.4851	
91.68	0.5984	
110.8	0.7116	
133.8	0.8256	
161.6	0.9424	
195.3	1.064	
235.9	1.192	
285.0	1.328	
344.3	1.473	
416.0	1.629	
502.5	1.795	
607.1	1.971	
733.5	2.159	
886.1	2.358	
1070.0	2.569	
1293.0	2.789	
1562.0	3.02	
1887.0	3.26	
2280.0	3.508	
2755.0	3.763	
3328.0	4.023	
4021.0	4.287	
4857.0	4.554	
5868.0	4.82	
7089.0	5.084	
8564.0	5.344	
10350.0	5.596	
12500.0	5.838	
15100.0	6.068	
18240.0	6.281	
22040.0	6.475	
26630.0	6.646	
32170.0	6.791	
38860.0	6.907	
46950.0	6.99	
56710.0	7.038	
68520.0	7.046	
82770.0	7.014	
-----