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Plasma-Surface Interaction Data Set 425

Sputtering of 3He+ on Tm(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Tm(pc) at 300 K

angle = 0.0 deg E /eV P
42.980.0
50.340.000313
58.970.001226
69.080.003011
80.920.006034
94.790.01067
111.00.01716
130.10.02549
152.40.03532
178.50.04603
209.10.05692
244.90.06745
286.90.07727
336.10.08626
393.70.09442
461.20.1019
540.20.1087
632.80.115
741.30.1208
868.40.1262
1017.00.1313
1192.00.136
1396.00.1404
1635.00.1444
1915.00.148
2244.00.1512
2628.00.1539
3079.00.1562
3607.00.1579
4225.00.1591
4949.00.1596
5797.00.1595
6791.00.1588
7955.00.1574
9319.00.1553
10920.00.1525
12790.00.149
14980.00.1449
17550.00.1403
20550.00.1351
24080.00.1295
28200.00.1234
33040.00.1171
38700.00.1106
45340.00.1039
53110.00.09722
62210.00.09056
72880.00.084
85370.00.0776

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.98 – 100000