{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Tm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1329, "q": 0.4083, "mu": 1.581, "epsilonL": 5.398e-05, "Eth": 42.98}, "E_min": 42.98, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.98	0.0	
50.34	0.000313	
58.97	0.001226	
69.08	0.003011	
80.92	0.006034	
94.79	0.01067	
111.0	0.01716	
130.1	0.02549	
152.4	0.03532	
178.5	0.04603	
209.1	0.05692	
244.9	0.06745	
286.9	0.07727	
336.1	0.08626	
393.7	0.09442	
461.2	0.1019	
540.2	0.1087	
632.8	0.115	
741.3	0.1208	
868.4	0.1262	
1017.0	0.1313	
1192.0	0.136	
1396.0	0.1404	
1635.0	0.1444	
1915.0	0.148	
2244.0	0.1512	
2628.0	0.1539	
3079.0	0.1562	
3607.0	0.1579	
4225.0	0.1591	
4949.0	0.1596	
5797.0	0.1595	
6791.0	0.1588	
7955.0	0.1574	
9319.0	0.1553	
10920.0	0.1525	
12790.0	0.149	
14980.0	0.1449	
17550.0	0.1403	
20550.0	0.1351	
24080.0	0.1295	
28200.0	0.1234	
33040.0	0.1171	
38700.0	0.1106	
45340.0	0.1039	
53110.0	0.09722	
62210.0	0.09056	
72880.0	0.084	
85370.0	0.0776	
-----