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Plasma-Surface Interaction Data Set 424

Sputtering of T+ on Tm(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Tm(pc) at 300 K

angle = 0.0 deg E /eV P
39.580.0
46.440.0001629
54.490.0007308
63.940.001958
75.030.004184
88.040.007754
103.30.01287
121.20.01943
142.20.02696
166.90.03477
195.80.04224
229.80.04899
269.60.05489
316.40.05998
371.20.06438
435.60.06821
511.10.07159
599.70.07458
703.70.07725
825.70.07963
968.80.08172
1137.00.08354
1334.00.08507
1565.00.0863
1837.00.08722
2155.00.0878
2529.00.08804
2967.00.08791
3482.00.0874
4085.00.08651
4793.00.08523
5625.00.08358
6600.00.08155
7744.00.07917
9087.00.07648
10660.00.0735
12510.00.07028
14680.00.06685
17230.00.06328
20210.00.05961
23720.00.05589
27830.00.05215
32650.00.04846
38310.00.04483
44960.00.04132
52750.00.03793
61900.00.0347
72630.00.03163
85220.00.02874

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 39.58 – 100000