{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Tm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2005, "q": 0.2252, "mu": 1.749, "epsilonL": 0.0001097, "Eth": 39.58}, "E_min": 39.58, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
39.58	0.0	
46.44	0.0001629	
54.49	0.0007308	
63.94	0.001958	
75.03	0.004184	
88.04	0.007754	
103.3	0.01287	
121.2	0.01943	
142.2	0.02696	
166.9	0.03477	
195.8	0.04224	
229.8	0.04899	
269.6	0.05489	
316.4	0.05998	
371.2	0.06438	
435.6	0.06821	
511.1	0.07159	
599.7	0.07458	
703.7	0.07725	
825.7	0.07963	
968.8	0.08172	
1137.0	0.08354	
1334.0	0.08507	
1565.0	0.0863	
1837.0	0.08722	
2155.0	0.0878	
2529.0	0.08804	
2967.0	0.08791	
3482.0	0.0874	
4085.0	0.08651	
4793.0	0.08523	
5625.0	0.08358	
6600.0	0.08155	
7744.0	0.07917	
9087.0	0.07648	
10660.0	0.0735	
12510.0	0.07028	
14680.0	0.06685	
17230.0	0.06328	
20210.0	0.05961	
23720.0	0.05589	
27830.0	0.05215	
32650.0	0.04846	
38310.0	0.04483	
44960.0	0.04132	
52750.0	0.03793	
61900.0	0.0347	
72630.0	0.03163	
85220.0	0.02874	
-----