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Plasma-Surface Interaction Data Set 423

Sputtering of D+ on Tm(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Tm(pc) at 300 K

angle = 0.0 deg E /eV P
61.70.0
71.750.0002047
83.430.000796
97.010.001929
112.80.003796
131.20.006558
152.50.01027
177.40.01479
206.20.01983
239.80.02501
278.80.02997
324.20.03448
377.00.03845
438.40.04187
509.80.0448
592.70.04731
689.20.04946
801.40.05132
931.90.05291
1084.00.05426
1260.00.0554
1465.00.05632
1704.00.05704
1981.00.05755
2304.00.05784
2679.00.05792
3115.00.05777
3622.00.05739
4211.00.05678
4897.00.05595
5694.00.05489
6621.00.05361
7699.00.05213
8952.00.05047
10410.00.04863
12100.00.04665
14070.00.04454
16370.00.04235
19030.00.04008
22130.00.03778
25730.00.03546
29920.00.03315
34790.00.03087
40460.00.02864
47040.00.02648
54700.00.02441
63600.00.02242
73960.00.02054
86000.00.01876

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 61.7 – 100000