{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Tm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1931, "q": 0.1483, "mu": 1.593, "epsilonL": 0.0001104, "Eth": 61.7}, "E_min": 61.7, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
61.7	0.0	
71.75	0.0002047	
83.43	0.000796	
97.01	0.001929	
112.8	0.003796	
131.2	0.006558	
152.5	0.01027	
177.4	0.01479	
206.2	0.01983	
239.8	0.02501	
278.8	0.02997	
324.2	0.03448	
377.0	0.03845	
438.4	0.04187	
509.8	0.0448	
592.7	0.04731	
689.2	0.04946	
801.4	0.05132	
931.9	0.05291	
1084.0	0.05426	
1260.0	0.0554	
1465.0	0.05632	
1704.0	0.05704	
1981.0	0.05755	
2304.0	0.05784	
2679.0	0.05792	
3115.0	0.05777	
3622.0	0.05739	
4211.0	0.05678	
4897.0	0.05595	
5694.0	0.05489	
6621.0	0.05361	
7699.0	0.05213	
8952.0	0.05047	
10410.0	0.04863	
12100.0	0.04665	
14070.0	0.04454	
16370.0	0.04235	
19030.0	0.04008	
22130.0	0.03778	
25730.0	0.03546	
29920.0	0.03315	
34790.0	0.03087	
40460.0	0.02864	
47040.0	0.02648	
54700.0	0.02441	
63600.0	0.02242	
73960.0	0.02054	
86000.0	0.01876	
-----