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Plasma-Surface Interaction Data Set 420

Sputtering of 4He+ on Tb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Tb(pc) at 300 K

angle = 0.0 deg E /eV P
48.495.82e-27
56.670.0002671
66.220.0009936
77.380.002365
90.420.004639
105.70.008094
123.50.01294
144.30.01925
168.60.02684
197.00.03533
230.20.04421
269.00.053
314.30.06132
367.30.069
429.20.07597
501.50.08227
586.00.08797
684.80.09315
800.20.09787
935.00.1022
1093.00.1061
1277.00.1098
1492.00.1131
1743.00.116
2037.00.1186
2380.00.1209
2782.00.1227
3250.00.1242
3798.00.1252
4438.00.1257
5186.00.1258
6060.00.1254
7082.00.1244
8275.00.123
9670.00.121
11300.00.1185
13200.00.1155
15430.00.112
18030.00.1081
21070.00.1039
24620.00.0993
28770.00.09449
33610.00.08948
39280.00.08435
45900.00.07916
53630.00.07397
62670.00.06883
73240.00.06379
85580.00.0589

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 48.49 – 100000