{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1613, "q": 0.3219, "mu": 1.519, "epsilonL": 5.794e-05, "Eth": 48.49}, "E_min": 48.49, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
48.49	5.82e-27	
56.67	0.0002671	
66.22	0.0009936	
77.38	0.002365	
90.42	0.004639	
105.7	0.008094	
123.5	0.01294	
144.3	0.01925	
168.6	0.02684	
197.0	0.03533	
230.2	0.04421	
269.0	0.053	
314.3	0.06132	
367.3	0.069	
429.2	0.07597	
501.5	0.08227	
586.0	0.08797	
684.8	0.09315	
800.2	0.09787	
935.0	0.1022	
1093.0	0.1061	
1277.0	0.1098	
1492.0	0.1131	
1743.0	0.116	
2037.0	0.1186	
2380.0	0.1209	
2782.0	0.1227	
3250.0	0.1242	
3798.0	0.1252	
4438.0	0.1257	
5186.0	0.1258	
6060.0	0.1254	
7082.0	0.1244	
8275.0	0.123	
9670.0	0.121	
11300.0	0.1185	
13200.0	0.1155	
15430.0	0.112	
18030.0	0.1081	
21070.0	0.1039	
24620.0	0.0993	
28770.0	0.09449	
33610.0	0.08948	
39280.0	0.08435	
45900.0	0.07916	
53630.0	0.07397	
62670.0	0.06883	
73240.0	0.06379	
85580.0	0.0589	
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