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Plasma-Surface Interaction Data Set 419

Sputtering of 3He+ on Tb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Tb(pc) at 300 K

angle = 0.0 deg E /eV P
62.380.0
72.520.0001792
84.310.0006782
98.010.001629
113.90.003219
132.50.005654
154.00.009109
179.00.01366
208.10.01922
241.90.02551
281.30.03217
327.00.03881
380.10.04511
441.90.0509
513.80.05611
597.30.06076
694.30.06491
807.20.06861
938.40.07192
1091.00.0749
1268.00.07759
1474.00.07999
1714.00.08214
1993.00.08403
2316.00.08566
2693.00.08702
3131.00.08809
3640.00.08888
4231.00.08935
4919.00.08951
5718.00.08932
6648.00.0888
7728.00.08793
8984.00.08671
10440.00.08514
12140.00.08324
14120.00.08102
16410.00.07851
19080.00.07573
22180.00.07272
25780.00.06951
29970.00.06615
34850.00.06268
40510.00.05914
47090.00.05556
54750.00.05199
63650.00.04847
73990.00.04501
86020.00.04166

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 62.38 – 100000