{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.197, "q": 0.229, "mu": 1.55, "epsilonL": 5.829e-05, "Eth": 62.38}, "E_min": 62.38, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
62.38	0.0	
72.52	0.0001792	
84.31	0.0006782	
98.01	0.001629	
113.9	0.003219	
132.5	0.005654	
154.0	0.009109	
179.0	0.01366	
208.1	0.01922	
241.9	0.02551	
281.3	0.03217	
327.0	0.03881	
380.1	0.04511	
441.9	0.0509	
513.8	0.05611	
597.3	0.06076	
694.3	0.06491	
807.2	0.06861	
938.4	0.07192	
1091.0	0.0749	
1268.0	0.07759	
1474.0	0.07999	
1714.0	0.08214	
1993.0	0.08403	
2316.0	0.08566	
2693.0	0.08702	
3131.0	0.08809	
3640.0	0.08888	
4231.0	0.08935	
4919.0	0.08951	
5718.0	0.08932	
6648.0	0.0888	
7728.0	0.08793	
8984.0	0.08671	
10440.0	0.08514	
12140.0	0.08324	
14120.0	0.08102	
16410.0	0.07851	
19080.0	0.07573	
22180.0	0.07272	
25780.0	0.06951	
29970.0	0.06615	
34850.0	0.06268	
40510.0	0.05914	
47090.0	0.05556	
54750.0	0.05199	
63650.0	0.04847	
73990.0	0.04501	
86020.0	0.04166	
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