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Plasma-Surface Interaction Data Set 418

Sputtering of T+ on Tb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Tb(pc) at 300 K

angle = 0.0 deg E /eV P
58.871.121e-30
68.529.088e-05
79.750.0003987
92.820.00105
108.00.002212
125.70.004065
146.40.006725
170.40.01017
198.30.0142
230.80.01846
268.60.02259
312.60.02636
363.90.02964
423.50.03242
492.90.03476
573.70.03672
667.80.03838
777.20.03979
904.60.04099
1053.00.04199
1225.00.04283
1426.00.0435
1660.00.044
1932.00.04434
2249.00.04451
2618.00.04451
3047.00.04434
3546.00.04399
4127.00.04345
4804.00.04275
5591.00.04187
6508.00.04082
7574.00.03962
8816.00.03828
10260.00.03682
11940.00.03525
13900.00.03359
16180.00.03187
18830.00.0301
21920.00.02831
25510.00.02651
29690.00.02474
34560.00.02299
40220.00.02129
46820.00.01964
54490.00.01807
63420.00.01657
73820.00.01515
85920.00.01381

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 58.87 – 100000