{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2675, "q": 0.114, "mu": 1.738, "epsilonL": 0.0001186, "Eth": 58.87}, "E_min": 58.87, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
58.87	1.121e-30	
68.52	9.088e-05	
79.75	0.0003987	
92.82	0.00105	
108.0	0.002212	
125.7	0.004065	
146.4	0.006725	
170.4	0.01017	
198.3	0.0142	
230.8	0.01846	
268.6	0.02259	
312.6	0.02636	
363.9	0.02964	
423.5	0.03242	
492.9	0.03476	
573.7	0.03672	
667.8	0.03838	
777.2	0.03979	
904.6	0.04099	
1053.0	0.04199	
1225.0	0.04283	
1426.0	0.0435	
1660.0	0.044	
1932.0	0.04434	
2249.0	0.04451	
2618.0	0.04451	
3047.0	0.04434	
3546.0	0.04399	
4127.0	0.04345	
4804.0	0.04275	
5591.0	0.04187	
6508.0	0.04082	
7574.0	0.03962	
8816.0	0.03828	
10260.0	0.03682	
11940.0	0.03525	
13900.0	0.03359	
16180.0	0.03187	
18830.0	0.0301	
21920.0	0.02831	
25510.0	0.02651	
29690.0	0.02474	
34560.0	0.02299	
40220.0	0.02129	
46820.0	0.01964	
54490.0	0.01807	
63420.0	0.01657	
73820.0	0.01515	
85920.0	0.01381	
-----